Pressure Sensors Based On Resistive Strain Sensors

Pressure sensor is designed for measuring various pressure parameters. Pressure is one of the key thermotechnical values and an important technological processes parameter.

Pressure sensors are designed for the purpose of further integration into systems for measurement, control, adjustment, and management of processes, and are used to ensure continuous conversion of excessive pressure, absolute pressure, and differential pressure values. If adjusted accordingly, the sensors also provide conversion of negative pressure and excessive expansion pressure of liquid and gaseous media into a uniform DC signal and frequency output signal.

The pressure sensors are always popular and widely implemented. Pressure recording principle serves as a basis for many other sensors types, such as weighing cells, position sensors, fluid level and flow sensors, etc. In prevailing majority of cases, the pressure is indicated by deformation of elastic bodies, such as diaphragm, geogrid, corrugated membrane. Such sensors have adequate durability, low cost, but low electrical signals receiving capacity.

Nowadays the strain gauges are increasingly used as pressure sensors. The diffusion semiconductor strain gauges seem particularly promising. The diffusion strain gauges on silicon wafer are highly sensitive, compact, and are easy to be implemented together with peripheral circuits. The diffusion type semiconductor pressure sensors are widely used in automotive electronics and all kinds of compressors.

Diagram of  pressure sensors based on resistive strain sensors